Roll to Roll ALD
TransFlex Roll to Roll technology is a fast Roll to Roll ALD coating method that achieves high-speed, low cost deposition by weaving the flexible substrate back and forth between physically separated precursor regions.
Web speeds of up to 10 meters per second.
The web surface is the only surface that "sees" both reactants.
TransFlex ALD avoids the wasted precursor associated with conventional coating “heads”.
Film Properties of Conventional ALD
Ideal for various commercial & industrial applications
By far the fastest roll to roll ALD coating method ever demonstrated.
Unmatched for processing speed and cost
High speed ultra barrier coatings demonstrated in a single pass on PET
Continuous Roll to Roll processing at speeds up to 10 meters per second
Our unique patented technology for Roll to Roll PEALD achieves high speed, low cost deposition in a remarkably simple way.
We weave the flexible substrate back and forth between physically separated precursor regions. This geometry allows extended path lengths for the substrate in each of the reaction zones, allowing web speeds orders of magnitude faster than can be achieved in Spatial ALD reactors utilizing coating “heads”.
Operating under medium vacuum pressure similar to that used for conventional ALD, precursor separation is easily maintained by differential pressure and pumping, allowing large open passageways, millimeters wide, for the substrate to pass through. This is in stark contrast to atmospheric pressure Spatial ALD, where the passageway gaps must be restricted to 10’s of microns to avoid precursor mixing. And the use of a simple DC direct plasma instead of water as the oxygen precursor allows us to maintain very high web speeds, even at very low temperatures.
Vortex Batch ALD
High-volume production batch using rotating discs or cylinders to transport substrates.
Roll to Roll ALD
Continuous coating creation for large-area substrate films and foils.
Rapid Thermal ALD
High-speed processing utilizing ultrafast lasers for precise patterns.
Ultra-precise deposition zones with PlasmaShield technology.
Sheet-to-Sheet Processing Platform
PlasmaShieldTM technology with linear substrate movement for large area processing.
In-Line Roll to Roll Platform
A flexible Roll-to-Roll platform for moderate speed PEALD with straightforward web handling.
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If you're looking to learn how ALD could work in your application, we'd love to talk.