Blog
Applications
Technology
Vortex Batch ALD
High-volume production batch using rotating discs or cylinders to transport substrates.
TransFlexTM Roll to Roll ALD
Continuous coating creation for large-area substrate films and foils.
Rapid Thermal ALD
An innovative way to unlock the power of high temperature thermal ALD.
PlasmaShieldTM
Ultra-precise deposition zones with PlasmaShieldTM technology.
Sheet-to-Sheet Processing Platform
PlasmaShieldTM technology with linear substrate movement for large area processing.
In-Line Roll to Roll Platform
A flexible Roll-to-Roll platform for moderate speed PEALD with straightforward web handling.
Contact Us
New from LotusAT and the ALD Community
Join us in Helsinki to attend Eric Dickey's presentation of ALD at world class speed.
Read the post
In this post, we bust the common misconception that plasma is not compatible with high aspect ratio features for ALD coatings.
We hope you will come join us at 2024 SVC Tech Con in Chicago to see Eric's presentation on scaling ALD processing to large area substrates
We hope you will come join us at 2024 SVC Tech Con in Chicago to see Bryan's presentation on environmentally robust barrier layers
This is a great paper that we published at SVC Tech Con 2016 in which we explain how to maximize precursor utilization in spatial ALD via trap and reuse!
Visit us at 2024 ALD for Industry Conference in Dresden, Germany to see our latest research publication!
