ALD News

New from LotusAT and the ALD Community

News

Lotus News: LotusAT @ 2025 ALD For Industry Conference - Presenting on Novel Precursor Separation Method

Join us in Dresden, Germany to attend Eric Dickey's presentation on how PlasmaShield(TM) maintains micro- and macro-conformality at high speeds!

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News

Lotus News: LotusAT @ 2024 AVS International Conference: Vendor Exhibitor

Join us in Tampa, FL on November 5-7, 2024 to explore the various ways that Lotus AT coating and consulting services can help find better, faster, more efficient solutions for thin film applications.

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News

Lotus News: LotusAT @ 2024 ECS PRiME Conference - Presenting High Speed ALD film growth on 3D Objects

Join us in Hawaii to attend Eric Dickey's presentation of high speed ALD with double-sided plasma!

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Lotus News: LotusAT @ 2024 AVS ALD Conference - Presenting ALD film growth at 30 A/sec while maintaining saturation and conformality!

Join us in Helsinki to attend Eric Dickey's presentation of ALD at world class speed.

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Articles

Lotus Archives: Myth Busting - Conformal films via Plasma ALD!

In this post, we bust the common misconception that plasma is not compatible with high aspect ratio features for ALD coatings.

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Lotus News: Lotus AT's Eric Dickey Presenting at 2024 SVC Tech Con in Chicago, IL on Monday May 6, 2024

We hope you will come join us at 2024 SVC Tech Con in Chicago to see Eric's presentation on scaling ALD processing to large area substrates

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