Conventional ALD is an extremely precise manufacturing technique, but it can be complicated and costly.
Over the course of more than 15 years designing and implementing spatial ALD, Lotus AT has developed a broad set of proprietary techniques for cost-effective application of ALD technology.
A rotary batch technology that uses rotation of a disc or cylinder to transport the substrates
By far the fastest roll to roll ALD coating method ever demonstrated - up to 10 meters per second.
An innovative way to unlock the power of high temperature thermal ALD at lower substrate temperatures.
A rotary batch technology that uses rotation of a disc or cylinder to transport the substrates
By far the fastest roll to roll ALD coating method ever demonstrated - up to 10 meters per second.
A unique way to selectively deposit or “print” ALD films with sub-millimeter dimensions.
PlasmaShieldTM technology with linear substrate movement for large area processing.
A flexible Roll-to-Roll platform for moderate speed PEALD with straightforward web handling.
Lotus engages with major key players in emerging applications of industrial ALD, including Fortune 500 companies and other worldwide leaders.
If you're looking to learn how ALD could work in your application, we'd love to talk.