Leaders in Spatial ALD

Conventional ALD is an extremely precise manufacturing technique, but it can be complicated and costly.

Over the course of more than 15 years designing and implementing spatial ALD, Lotus AT has developed a broad set of proprietary techniques for cost-effective application of ALD technology.

VortexTM ALD

A rotary batch technology that uses rotation of a disc or cylinder to transport the substrates

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TransFlexTM
Roll to Roll ALD

By far the fastest roll to roll ALD coating method ever demonstrated - up to 10 meters per second.

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Rapid Thermal ALD

An innovative way to unlock the power of high temperature thermal ALD at lower substrate temperatures.

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PlasmaShieldTM

A highly localized plasma shroud for compact deployment.

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Sheet-to-Sheet Processing Platform

PlasmaShieldTM technology implemented with linear substrate movement for large area substrates.

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In-Line Roll to Roll Platform

A flexible Roll-to-Roll platform for moderate speed PEALD with straightforward web handling.

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VortexTM ALD

A rotary batch technology that uses rotation of a disc or cylinder to transport the substrates

Learn more

TransFlexTM
Roll to Roll ALD

By far the fastest roll to roll ALD coating method ever demonstrated - up to 10 meters per second.

Learn more

Rapid Thermal ALD

A unique way to selectively deposit or “print” ALD films with sub-millimeter dimensions.

Learn more

PlasmaShieldTM

A highly localized plasma shroud for compact deployment.

Learn more

Sheet-to-Sheet Processing Platform

PlasmaShieldTM technology with linear substrate movement for large area processing.

Learn more

Sheet-to-Sheet Processing Platform

A flexible Roll-to-Roll platform for moderate speed PEALD with straightforward web handling.

Learn more

Lotus engages with major key players in emerging applications of industrial ALD, including Fortune 500 companies and other worldwide leaders.

JVST A: Mar 2012, Vol 30, Issue 2 - High Rate R2R ALD

Innovative Spatial ALD system at the LZH can precisely coat complex-shaped optics

Beneq: Ultra-fast high precision spatial ALD coating

3M and Lotus Applied Technology Complete ALD Barrier Technology License Agreement

Want to work with us?

If you're looking to learn how ALD could work in your application, we'd love to talk.