Conventional ALD is an extremely precise manufacturing technique, but it can be complicated and costly.
Over the course of more than 15 years designing and implementing spatial ALD, Lotus AT has developed a broad set of proprietary techniques for cost-effective application of ALD technology.
A rotary batch technology that uses rotation of a disc or cylinder to transport the substrates
By far the fastest roll to roll ALD coating method ever demonstrated - up to 10 meters per second.
An innovative way to unlock the power of high temperature thermal ALD at lower substrate temperatures.
A rotary batch technology that uses rotation of a disc or cylinder to transport the substrates
By far the fastest roll to roll ALD coating method ever demonstrated - up to 10 meters per second.
A unique way to selectively deposit or “print” ALD films with sub-millimeter dimensions.
PlasmaShieldTM technology with linear substrate movement for large area processing.
A flexible Roll-to-Roll platform for moderate speed PEALD with straightforward web handling.
Lotus engages with major key players in emerging applications of industrial ALD, including Fortune 500 companies and other worldwide leaders.
Join us in Hawaii to attend Eric Dickey's presentation of high speed ALD with double-sided plasma!
Join us in Helsinki to attend Eric Dickey's presentation of ALD at world class speed.
In this post, we bust the common misconception that plasma is not compatible with high aspect ratio features for ALD coatings.
We hope you will come join us at 2024 SVC Tech Con in Chicago to see Bryan's presentation on environmentally robust barrier layers
This is a great paper that we published at SVC Tech Con 2016 in which we explain how to maximize precursor utilization in spatial ALD via trap and reuse!
Visit us at 2024 ALD for Industry Conference in Dresden, Germany to see our latest research publication!
Here we revisit one of Lotus' flagship publications featured in JVST-A back in 2012 about high-rate roll-to-roll spatial ALD using serpentine web translation.
Learn more about our partnership with Beneq in action at the Optics Integration Lab in Lazer Zentrum Hanover, Germany.
Check out our technology featured in Beneq's C2R spatial ALD tool!
If you're looking to learn how ALD could work in your application, we'd love to talk.