Leaders in Spatial ALD

Conventional ALD is an extremely precise manufacturing technique, but it can be complicated and costly.

Over the course of more than 15 years designing and implementing spatial ALD, Lotus AT has developed a broad set of proprietary techniques for cost-effective application of ALD technology.

VortexTM ALD

A rotary batch technology that uses rotation of a disc or cylinder to transport the substrates

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TransFlexTM
Roll to Roll ALD

By far the fastest roll to roll ALD coating method ever demonstrated - up to 10 meters per second.

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Rapid Thermal ALD

An innovative way to unlock the power of high temperature thermal ALD at lower substrate temperatures.

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PlasmaShieldTM

A highly localized plasma shroud for compact deployment.

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Sheet-to-Sheet Processing Platform

PlasmaShieldTM technology implemented with linear substrate movement for large area substrates.

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In-Line Roll to Roll Platform

A flexible Roll-to-Roll platform for moderate speed PEALD with straightforward web handling.

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VortexTM ALD

A rotary batch technology that uses rotation of a disc or cylinder to transport the substrates

Learn more

TransFlexTM
Roll to Roll ALD

By far the fastest roll to roll ALD coating method ever demonstrated - up to 10 meters per second.

Learn more

Rapid Thermal ALD

A unique way to selectively deposit or “print” ALD films with sub-millimeter dimensions.

Learn more

PlasmaShieldTM

A highly localized plasma shroud for compact deployment.

Learn more

Sheet-to-Sheet Processing Platform

PlasmaShieldTM technology with linear substrate movement for large area processing.

Learn more

Sheet-to-Sheet Processing Platform

A flexible Roll-to-Roll platform for moderate speed PEALD with straightforward web handling.

Learn more

Lotus engages with major key players in emerging applications of industrial ALD, including Fortune 500 companies and other worldwide leaders.

Lotus Archives: Myth Busting - Conformal films via Plasma ALD!

In this post, we bust the common misconception that plasma is not compatible with high aspect ratio features for ALD coatings.

Lotus News: Lotus AT's Bryan Danforth Presenting at 2024 SVC Tech Con in Chicago, IL on Monday May 6, 2024

We hope you will come join us at 2024 SVC Tech Con in Chicago to see Bryan's presentation on environmentally robust barrier layers

Lotus Archives: Optimization of Precursor Utilization Using Spatial ALD

This is a great paper that we published at SVC Tech Con 2016 in which we explain how to maximize precursor utilization in spatial ALD via trap and reuse!

Lotus News: Lotus AT Presenting at 2024 ALD For Industry Conference

Visit us at 2024 ALD for Industry Conference in Dresden, Germany to see our latest research publication!

Lotus Archives: High Rate R2R Spatial ALD - Serpentine Web Translation

Here we revisit one of Lotus' flagship publications featured in JVST-A back in 2012 about high-rate roll-to-roll spatial ALD using serpentine web translation.

Lotus News: Lotus AT technology in use at LZH Optics Lab

Learn more about our partnership with Beneq in action at the Optics Integration Lab in Lazer Zentrum Hanover, Germany.

Lotus News: Lotus AT technology integrated into Beneq C2R tool

Check out our technology featured in Beneq's C2R spatial ALD tool!

Want to work with us?

If you're looking to learn how ALD could work in your application, we'd love to talk.