Leaders in Spatial ALD
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Conventional ALD is an extremely precise manufacturing technique, but it can be complicated and costly.
Over the course of more than 15 years designing and implementing spatial ALD, Lotus AT has developed a broad set of proprietary techniques for cost-effective application of ALD technology.
VortexTM ALD
A rotary batch technology that uses rotation of a disc or cylinder to transport the substrates
TransFlexTM
Roll to Roll ALD
By far the fastest roll to roll ALD coating method ever demonstrated - up to 10 meters per second.
Rapid Thermal ALD
An innovative way to unlock the power of high temperature thermal ALD at lower substrate temperatures.
VortexTM ALD
A rotary batch technology that uses rotation of a disc or cylinder to transport the substrates
TransFlexTM
Roll to Roll ALD
By far the fastest roll to roll ALD coating method ever demonstrated - up to 10 meters per second.
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Rapid Thermal ALD
A unique way to selectively deposit or “print” ALD films with sub-millimeter dimensions.
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Sheet-to-Sheet Processing Platform
PlasmaShieldTM technology with linear substrate movement for large area processing.
Sheet-to-Sheet Processing Platform
A flexible Roll-to-Roll platform for moderate speed PEALD with straightforward web handling.
Lotus engages with major key players in emerging applications of industrial ALD, including Fortune 500 companies and other worldwide leaders.
JVST A: Mar 2012, Vol 30, Issue 2 - High Rate R2R ALD
Innovative Spatial ALD system at the LZH can precisely coat complex-shaped optics
Beneq: Ultra-fast high precision spatial ALD coating
3M and Lotus Applied Technology Complete ALD Barrier Technology License Agreement
Want to work with us?
If you're looking to learn how ALD could work in your application, we'd love to talk.
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