Lotus Archives: Optimization of Precursor Utilization Using Spatial ALD
This is a great paper that we published at SVC Tech Con 2016 in which we explain how to maximize precursor utilization in spatial ALD via trap and reuse!
Lotus Archives: High Rate R2R Spatial ALD - Serpentine Web Translation
Here we revisit one of Lotus' flagship publications featured in JVST-A back in 2012 about high-rate roll-to-roll spatial ALD using serpentine web translation.
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