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Applications
Technology
Vortex Batch ALD
High-volume production batch using rotating discs or cylinders to transport substrates.
TransFlexTM Roll to Roll ALD
Continuous coating creation for large-area substrate films and foils.
Rapid Thermal ALD
An innovative way to unlock the power of high temperature thermal ALD.
PlasmaShieldTM
Ultra-precise deposition zones with PlasmaShieldTM technology.
Sheet-to-Sheet Processing Platform
PlasmaShieldTM technology with linear substrate movement for large area processing.
In-Line Roll to Roll Platform
A flexible Roll-to-Roll platform for moderate speed PEALD with straightforward web handling.
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New from LotusAT and the ALD Community
Visit us at 2024 ALD for Industry Conference in Dresden, Germany to see our latest research publication!
Read the post
Here we revisit one of Lotus' flagship publications featured in JVST-A back in 2012 about high-rate roll-to-roll spatial ALD using serpentine web translation.
Learn more about our partnership with Beneq in action at the Optics Integration Lab in Lazer Zentrum Hanover, Germany.
Check out our technology featured in Beneq's C2R spatial ALD tool!
